Semiconductor Oxidation Furnaces Market - Strategic Insights and Forecasts (2025-2030)

Report CodeKSI061617046
PublishedNov, 2025

Description

Semiconductor Oxidation Furnaces Market Size:

Semiconductor Oxidation Furnaces Market, sustaining a 5.74% CAGR, is anticipated to reach USD 1.500 billion in 2030 from USD 1.135 billion in 2025.

Semiconductor Oxidation Furnaces Market Highlights:

  • Increasing electronics demand is driving growth in the semiconductor oxidation furnaces market.
  • Growing automotive sector is boosting the need for semiconductor oxidation equipment.
  • Asia Pacific is leading the oxidation furnaces market with robust manufacturing.
  • Advancing IC production is enhancing the use of high-performance oxidation systems.
  • Rising electric vehicle demand is fueling semiconductor oxidation furnace adoption.
  • Expanding industrial automation is promoting the use of advanced oxidation technologies.
  • Strengthening government policies supports the growth of semiconductor oxidation furnaces.

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The semiconductor oxidation furnace market is estimated to grow at a high pace. Semiconductor oxidation furnaces are used to provide the required levels of oxidation atmosphere for the oxidation process of semiconductors, and they also help in achieving the desired design for the semiconductor oxidation process, which is a vital part of the overall processing process for semiconductors. The oxidation of the wafer surface is the first step in the semiconductor device fabrication process, and it helps provide insulation and passivation layers. 

A bar chart showing Semiconductor Oxidation Furnaces Market size in USD Billion from 2025 to 20230 with CAGR

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Semiconductor Oxidation Furnaces Market Growth Drivers:

  • Growth in the electronics industry.

There is a noticeable growth in the electronics industry due to research and development efforts. For instance, the electronics industry in India is expected to grow by over 600% by 2025, according to a report published by the National Investment Promotion and Facilitation Agency in 2021. Many daily-use electronic products like smart televisions and smartphones are growing in demand globally, and their manufacturing involves using semiconductors to control and manage the flow of electric current. Therefore, as the need for consumer electronics grows, the demand for semiconductors will grow proportionately, boosting the semiconductor oxidation furnace market growth.

  • Demand for semiconductors by the automotive industry.

Semiconductors also find uses in growing industries such as automotive and healthcare, which helps further boost the semiconductor oxidation furnace industry size. Semiconductors are used extensively in modern automobiles for advanced driver assistance system technologies and other smart features such as autopilot driving and parking assistance. The global production of motor vehicles has grown by 6% from 2021 to 2022, per the International Organization for Motor Vehicle Manufacturers. Therefore, as the production and sale of automobiles grow, the demand for semiconductor oxidation furnaces for semiconductor oxidation purposes will continue to grow steadily.

Restraints to the industry’s expansion:

  • Technical complexities

Another additional barrier to the industry's growth is the need for technically skilled and competent labor to operate the semiconductor oxidation furnaces during fabrication. The lack of professional operators can act as a barrier to growth; additionally, hiring skilled labor adds to the overall cost of the product, which further reduces its affordability.

Semiconductor Oxidation Furnaces Market Products Offerings:

  • Centrotherm offers its c.OXIDATOR oxidation furnace for high-temperature oxidation has been specially designed to carry out silicon carbide oxidation. However, it can also be used for silicon oxidation. The product is available in different versions, allowing multiple wafer sizes up to 200mm. The oxidation furnace also supports wet oxidation and can handle temperatures up to 1500 degree Celsius. The product is designed to offer a high level of performance at a smaller carbon footprint and is relatively more affordable and flexible in process usage.
  • ASM International offers its SONORA vertical furnace, a 300mm vertical furnace that can be used for logic and memory applications. It is capable of wafer processing in both atmospheric and low-pressure thermal conditions. The product offers high productivity at lower energy consumption levels and better reliability and ease of use.

Semiconductor Oxidation Furnaces Market Geographical Outlook:

  • The Asia Pacific semiconductor oxidation furnace market is expected to witness robust growth over the forecast period. 

Asia Pacific is expected to constitute a significant share of the semiconductor oxidation furnace industry, and similar trends are expected to be followed in the forecast period. This market share is owed to the growth in electronics and automotive sectors in the region's major economies, such as China and India, as well as the growing electronics industry bases in countries like China, South Korea, and Japan.

  • China and Taiwan are lucrative markets.

China holds one of the largest electronics production bases in the world and is also considered one of the largest manufacturing hubs globally. These are two key factors that will continue to increase the demand for semiconductors in Chinese markets, as growing industries such as electronics, healthcare, defense, automotive, etc., will continue to demand more semiconductors, which will help in the growth of the semiconductor oxidation furnace market size. In India, the focus on domestic production has led to increased industrial development in all sectors, proportionately driving the demand for semiconductors.

  • Forecast for the Rest of the World.

It is anticipated that North American and European markets will experience moderate growth. The semiconductor oxidation furnaces industry in the United States is expected to see a surge in demand due to an increase in industrial operations in electronics, automobiles, and specifically electric vehicles and defense sectors, as this growth in these industries will drive the demand for semiconductor materials.

Semiconductor Oxidation Furnaces Market Key Developments:

  • November 2025: Tokyo Electron completed its Tohoku Production and Logistics Centre, boosting manufacturing capacity for thermal processing systems including oxidation furnaces for advanced semiconductor nodes.
  • September 2025: ASM International released its SONORA 300mm vertical furnace for logic and memory, providing high productivity, lower energy consumption, and reliable processing conditions.
  • August 2025: India approved four semiconductor projects worth US$524 million, accelerating domestic fab expansions and demand for oxidation furnaces in automotive and defense applications.

List of Top Semiconductor Oxidation Furnaces Companies:

  • Centrotherm
  • NAURA
  • Hitachi
  • Tystar
  • Tempress

Semiconductor Oxidation Furnaces Market Scope:

Report Metric Details
Semiconductor Oxidation Furnaces Market Size in 2025 USD 1.135 billion
Semiconductor Oxidation Furnaces Market Size in 2030 USD 1.500 billion
Growth Rate CAGR of 5.74%
Study Period 2020 to 2030
Historical Data 2020 to 2023
Base Year 2024
Forecast Period 2025 – 2030
Forecast Unit (Value) USD Billion
Segmentation
  • Type
  • Application
  • Geography
Geographical Segmentation North America, South America, Europe, Middle East and Africa, Asia Pacific
List of Major Companies in Semiconductor Oxidation Furnaces Market
  • Tempress
  • ASM International
  • JTECT Thermco Systems
  • Amtech System
  • SVCS Process Innovation
Customization Scope Free report customization with purchase

Semiconductor Oxidation Furnace Market Segmentation:

  • By Furnace Type
    • Horizontal
    • Vertical
  • By Process
    • Wet Oxidation
    • Dry Oxidation
    • Others
  • By Wafer Size
    • Up to 100 mm
    • 100 to 200 mm
    • Greater than 200 mm
  • By Application
    • Integrated Circuits
    • Discrete Devices
    • Others
  • By Geography
    • Americas
      • USA
    • Europe Middle East and Africa
      • Germany
      • United Kingdom
      • Netherlands
      • Others
    • Asia Pacific
      • China
      • Japan
      • South Korea
      • Taiwan
      • Others

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Frequently Asked Questions (FAQs)

The semiconductor oxidation furnaces market is expected to reach a total market size of US$1.500 billion by 2030.

Semiconductor Oxidation Furnaces Market is valued at US$1.135 billion in 2025.

The semiconductor oxidation furnaces market is expected to grow at a CAGR of 5.74% during the forecast period.

As the demand for consumer electronics grows, the demand for semiconductors will grow proportionately which will drive the semiconductor oxidation furnace market growth.

Asia Pacific is expected to hold a significant share of the semiconductor oxidation furnace market owing to the growth in electronics and automotive sectors in the major economies of the region.

Table Of Contents

1. EXECUTIVE SUMMARY 

2. MARKET SNAPSHOT

2.1. Market Overview

2.2. Market Definition

2.3. Scope of the Study

2.4. Market Segmentation

3. BUSINESS LANDSCAPE 

3.1. Market Drivers

3.2. Market Restraints

3.3. Market Opportunities 

3.4. Porter’s Five Forces Analysis

3.5. Industry Value Chain Analysis

3.6. Policies and Regulations 

3.7. Strategic Recommendations 

4. TECHNOLOGICAL OUTLOOK

5. SEMICONDUCTOR OXIDATION FURNACE MARKET BY FURNACE TYPE

5.1. Introduction

5.2. Horizontal

5.3. Vertical

6. SEMICONDUCTOR OXIDATION FURNACE MARKET BY PROCESS

6.1. Introduction

6.2. Wet Oxidation

6.3. Dry Oxidation

6.4. Others

7. SEMICONDUCTOR POLISHING PADS MARKET BY WAFER SIZE

7.1. Introduction

7.2. Up to 100 mm

7.3. 100 to 200 mm

7.4. Greater than 200 mm

8. SEMICONDUCTOR POLISHING PADS MARKET BY APPLICATION

8.1. Introduction

8.2. Integrated Circuits

8.3. Discrete Devices

8.4. Others

9. SEMICONDUCTOR POLISHING PADS MARKET BY GEOGRAPHY

9.1. Introduction

9.2. Americas

9.2.1. USA

9.3. Europe Middle East and Africa

9.3.1. Germany

9.3.2. United Kingdom

9.3.3. Netherlands

9.3.4. Others

9.4. Asia Pacific

9.4.1. China

9.4.2. Japan

9.4.3. South Korea

9.4.4. Taiwan

9.4.5. Others

10. COMPETITIVE ENVIRONMENT AND ANALYSIS

10.1. Major Players and Strategy Analysis

10.2. Market Share Analysis

10.3. Mergers, Acquisitions, Agreements, and Collaborations

10.4. Competitive Dashboard

11. COMPANY PROFILES

11.1. Centrotherm

11.2. Zhengzhou KJ Technology Co., Ltd. (KJ Group)

11.3. Tystar Corporation

11.4. Tempress

11.5. ASM International N.V

11.6. JTEKT Thermo Systems Corporation

11.7. Amtech System Inc.

11.8. SVCS Process Innovation

11.9. Tokyo Electron Limited

11.10. Kokusai Electric Corporation (Nisshinbo Holdings Inc)

12. APPENDIX

12.1. Currency 

12.2. Assumptions

12.3. Base and Forecast Years Timeline

12.4. Key benefits for the stakeholders

12.5. Research Methodology 

12.6. Abbreviations 

LIST OF FIGURES

LIST OF TABLES

Companies Profiled

Centrotherm

Zhengzhou KJ Technology Co., Ltd. (KJ Group)

Tystar Corporation

Tempress

ASM International N.V

JTEKT Thermo Systems Corporation

Amtech System Inc.

SVCS Process Innovation

Tokyo Electron Limited

Kokusai Electric Corporation (Nisshinbo Holdings Inc)

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